作者：Francesca Intranuovo;Eloisa Sardella;Pasqua Rossini;Riccardo d’Agostino;Pietro Favia;
作者單位：Department of Chemistry, University of Bari via Orabona, 4, 70126 Bari (Italy);CNR-IMIP Institute of Inorganic Methodologies and Plasma (IMIP) Bari (Italy);Plasma Solution Srl, Spin off of the University of Bari via Orabona, 4, 70126 Bari (Italy);Departme
刊名：Chemical vapor deposition
ISSN：0948-1907
出版年：2009-01-05
卷：15
期：41005
起頁：95
止頁：100
分類號：TQ175
語種：英文
關(guān)鍵詞：Afterglow;Coatings;Hexafluoropropylene oxide;Microstructures;PECVD;
內(nèi)容簡介Smooth and micro/nano-structured fluorocarbon coatings are obtained by radio frequency (RF), 13.56 MHz, glow discharges fed with hexafluoropropylene oxide (C3F6O, HFPO) both in glow and in afterglow. It is shown that the extent of micro/ nanostructuring, as well as the F/C ratio of the coatings, can be precisely tuned with both substrate position and deposition time. Nodular and ‘‘stone roses’’ morphological features are easily obtained, with good reproducibility, by controlling the plasma parameters. Both chemical and morphological features are shown to deeply affect film properties and, in turn, wetability, allowing a move from a hydrophobic behavior to a superhydrophobic one.
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