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作者：Niu, J.;Liu, D.;Ou, Y.;You, Y.;Yu, N.;

作者單位：Research Center for Optoelectronics, Dalian Nationalities University, Dalian 116600, China;Research Center for Optoelectronics, Dalian Nationalities University, Dalian 116600, China;Research Center for Optoelectronics, Dalian Nationalities University, Dal

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2010-01-05

卷：16

期：41099

起頁：203

止頁：205

分類號：TQ175

語種：英文

關(guān)鍵詞：

內(nèi)容簡介

Large-area (370mm×500mm) diamondlike carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.