作者：Jonathan Jilesen;Fue-Sang Lien;
作者單位：Department of Mechanical Engineering, University of Waterloo 200 University Avenue West, Waterloo, Ontario, N2L 2G1 (Canada);Department of Mechanical Engineering, University of Waterloo 200 University Avenue West, Waterloo, Ontario, N2L 2G1 (Canada)
刊名：Chemical vapor deposition
ISSN：0948-1907
出版年：2010-01-05
卷：16
期：40911
起頁：65
止頁：71
分類號：TQ175
語種：英文
關鍵詞：Biomaterials;Calcium lactate;Hydroxyapatite;PP-MOCVD;Trimethyl phosphate;
內容簡介Currently there are two main methods used for coupling macroscopic reactor-scale and microscopic feature-scale models in multi-scale CVD simulation. These methods differ in the plane selected for coupling. With one method, coupling occurs at a source plane offset from the deposition surface, while in the other method coupling occurs on the deposition surface itself. The two methods also have different feature-scale modeling techniques associated with them. A Monte Carlo (MC) technique is used for the source plane-coupling method, while a ballistic transport technique is used for the deposition surface-coupling method. In this study a multi-scale code with a ballistic feature-scale model is modified so that both coupling methods can be applied, allowing for direct comparison of the two coupling methods.
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