作者：Klauser, F.;Steinmüller-Nethl, D.;Kaindl, R.;Bertel, E.;Memmel, N.;
作者單位：Institute of Physical Chemistry, University of Innsbruck Innrain 52a, 6020, Innsbruck, Australia;R-BeSt coating GmbH Exlgasse 20a, 6020, Innsbruck, Australia;Institute of Mineralogy Petrography, University of Innsbruck Innrain 52, 6020, Innsbruck, Austral
刊名：Chemical vapor deposition
ISSN：0948-1907
出版年：2010-01-05
卷：16
期：41005
起頁：127
止頁：135
分類號：TQ175
語種：英文
關(guān)鍵詞：AFM;HFCVD;NCD;Raman;UNCD;XRD;
內(nèi)容簡介Amulti-wavelength, visible-Raman study of structurally different nanocrystalline diamond (NCD) films grown by means of hotfilament (HF)CVD is presented. The Raman spectra are qualitatively and quantitatively analyzed by applying current interpretation models. It is demonstrated that specific properties of the diamond phase as well as the grain boundaries can be extracted from the Raman spectr A. Hydrogenated amorphous carbon is detected in the films grain boundaries and characterized regarding its hydrogen content, optical gap, and sp3 content. The characteristic trans-polyacetylene-like signals are observed, and the behavior of the corresponding peaks studied in detail. The results are correlated with film properties such as grain size, morphology, roughness, and refractive index, as determined by atomic force microscopy (AFM), X-ray diffraction (XRD), and ellipsometry.
所需耐材幣：0
